Research on Laser-Induced Damage Post-Restoration Morphology of Fused Silica and Optimization of Patterned CO2 Laser Repair Strategy

Fused silica has become the preferred optical material in field of inertial confinement fusion (ICF) due to its excellent performance; however, these costly elements are vulnerable, and their manufacture is time-consuming. Therefore, restoration laser-induced damage for great value. To restrain post-restoration raised rim problem CO2 laser repair process improve quality, separate influences key parameters power, irradiation duration, beam diameter on pit morphology compared combined simulation experimental studies. An optimized, patterned strategy proposed verified; results indicate that, with strategy, height decreases from 2.6 μm 1.52 μm, maximal photo thermal absorption decreased 784.2 PPM 209.43 PPM.